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SMC Vacuum Valves（Type：Air-Actuated Vacuum Valve）

4 items

: 30; 45; 60

Days to Ship	All 4 Day(s) or Less 6 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less 13 Day(s) or Less 14 Day(s) or Less 16 Day(s) or Less 18 Day(s) or Less 32 Day(s) or Less

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

CAD ：

2D / 3D

Days to Ship: Quote
Vacuum Assist Valve ZP2V Series

SMC

A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series

SMC

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

CAD ：

2D / 3D

Days to Ship: Quote
Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more

Days to Ship:	Quote

Days to Ship:	32 Day(s) or more

Days to Ship:	Quote

Days to Ship:	32 Day(s) or more


Brand
Product Series
CAD
Days to Ship
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value


Brand	SMC	SMC	SMC	SMC
Product Series	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Vacuum Assist Valve ZP2V Series	Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series	Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Days to Ship	Quote	32 Day(s) or more	Quote	32 Day(s) or more
Type	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve
Application	Single Use	Single Use	Single Use	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct
Number of Ports	2-Port Valve	2-Port Valve	3-Port Valve	2-Port Valve
Solenoid Type	-	-	Single	-
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed
Driving Type	-	-	-	-
Effective Sectional Area(mm2)	-	0.07 ～ 0.78	-	-
Pipe Port Type	Flange	M / Rc / NPT / One-Touch Plumbing	Flange	Flange
Plumbing Thread Nominal	-	M5 / 1/8 / M6 / M8	-	-
Connecting Tube Diameter	-	Ø4 / Ø6	-	-
Flange Type	KF / K	-	NW / Others	NW / Others
Flange Nominal	25 / 40 / 50 / 63 / 80	-	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80
CV Value	-	0.0037940379 ～ 0.0422764228	-	-

Configure

Specification/Dimensions

Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
Clear