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Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 24/11/2024 to 7:00 (SGT) 25/11/2024. We apologize for the inconvenience.
Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.

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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series (Part Numbers)

SMC

[11-Series Clean Series]
・ This product can be used in a clean environment
・ Prevents dust generation in the cleanroom

[20-series Copper-Free/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

[22-Series, Copper-Free/ Fluorine-Free/ Silicone Type-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials
・ The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series)

(i)Caution

Refer to the manufacturer's catalog for specification and material details.
The product images are representative only. Please refer to the manufacturer's catalog for shape details.
CAD data is not available for some model numbers.

Part Number

Configured Part Number is shown.

: 30; 60; 90

Part Number
11-MSQA10R-M9BV
11-MSQA10R-M9BVL
11-MSQA10R-M9BW
11-MSQA10R-M9BWL
11-MSQA10R-M9BWZ
11-MSQA10R-M9N
11-MSQA10R-M9NAL
11-MSQA10R-M9NL
11-MSQA10R-M9NV
11-MSQA10R-M9NVL
11-MSQA10R-M9NZ
11-MSQA20A
11-MSQA20A-A90
11-MSQA20A-A90L
11-MSQA20A-A90VL
11-MSQA20A-A93
11-MSQA20A-A93L
11-MSQA20A-A93V
11-MSQA20A-M9B
11-MSQA20A-M9BL
11-MSQA20A-M9BVL
11-MSQA20A-M9BWVL
11-MSQA20A-M9BZ
11-MSQA20A-M9N
11-MSQA20A-M9NL
11-MSQA20A-M9PWVL
11-MSQA20R
11-MSQA20R-A90
11-MSQA20R-A93
11-MSQA20R-A93L
11-MSQA20R-A93V
11-MSQA20R-A93VL
11-MSQA20R-A96L
11-MSQA20R-M9B
11-MSQA20R-M9BL
11-MSQA20R-M9BM
11-MSQA20R-M9BVL
11-MSQA20R-M9BWL
11-MSQA20R-M9BWZ
11-MSQA20R-M9N
11-MSQA20R-M9NL
11-MSQA20R-M9NL3
11-MSQA20R-M9PL
11-MSQA30A
11-MSQA30A-A90
11-MSQA30A-M9B
11-MSQA30A-M9BL
11-MSQA30A-M9BWVL
11-MSQA30A-M9BWZ
11-MSQA30A-M9N
11-MSQA30A-M9NL
11-MSQA30R
11-MSQA30R-A90
11-MSQA30R-A90VL
11-MSQA30R-A93
11-MSQA30R-A93L
11-MSQA30R-M9B
11-MSQA30R-M9BL
11-MSQA30R-M9BW
11-MSQA30R-M9N
11-MSQA30R-M9NVL
11-MSQA30R-M9P
11-MSQA50A
11-MSQA50A-A93
11-MSQA50A-A93L
11-MSQA50A-A93V
11-MSQA50A-M9B
11-MSQA50A-M9BW
11-MSQA50A-M9BWV
11-MSQA50A-M9BZ
11-MSQA50A-M9N
11-MSQA50A-M9NVL
11-MSQA50R
11-MSQA50R-A90
11-MSQA50R-A90L
11-MSQA50R-A93L
11-MSQA50R-A93VL
11-MSQA50R-M9B
11-MSQA50R-M9BL
11-MSQA50R-M9BW
11-MSQA50R-M9N
11-MSQA50R-M9NL
11-MSQA50R-M9NV
11-MSQB1A
11-MSQB1A-F8B
11-MSQB1A-F8NL
11-MSQB1A-M9B
11-MSQB1A-M9BL
11-MSQB1A-M9BS
11-MSQB1A-M9BV

Standard Unit Price	Minimum order quantity	Days to Ship	Environment, Applications	Rigidity, Accuracy	Tube Nominal Dia.	Allowable Kinetic Energy (J)	Allowable Kinetic Energy (J)	Format	Size	Connection port location	Switch	Lead wire (m)	Number of switches	Port types	Connector type	Type
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9BV	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9BV	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9BW	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9BW	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9BW	5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,566.60	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9N	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9NA	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,577.57	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9N	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,578.97	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9NV	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,591.33	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9NV	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø15	0.01 to Less Than 0.1	0.039	With shock absorber	10	Side ported	M9N	5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,405.72	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	Without auto switch (built-in magnet)	None	None	M5	None	Clean Series (Vacuum type)
SGD 1,444.10	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	A90	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	A90	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	A90V	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	A93	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	A93	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	A93V	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,509.20	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9B	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9B	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,537.08	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9BV	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9BWV	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9B	5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,512.35	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9N	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,524.72	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9N	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.01 to Less Than 0.1	0.025	Includes adjusting bolt	20	Side ported	M9PWV	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,554.35	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	Without auto switch (built-in magnet)	None	None	M5	None	Clean Series (Vacuum type)
SGD 1,592.85	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	A90	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,617.70	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	A93	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,630.07	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	A93	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,630.07	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	A93V	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	A93V	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	A96	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,656.55	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9B	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,670.31	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9B	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9B	1	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9BV	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9BW	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9BW	5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,661.10	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9N	0.5	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,671.95	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9N	3	2 pcs.	M5	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9N	3	3 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,671.95	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø18	0.1 to Less Than 1	0.116	With shock absorber	20	Side ported	M9P	3	2 pcs.	M5	None	Clean Series (Vacuum type)
SGD 1,493.33	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	Without auto switch (built-in magnet)	None	None	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,531.95	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	A90	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,597.05	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	M9B	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,608.02	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	M9B	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	M9BWV	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,631.12	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	M9BW	5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,598.68	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	M9N	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,612.57	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.01 to Less Than 0.1	0.048	Includes adjusting bolt	30	Side ported	M9N	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,642.08	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	Without auto switch (built-in magnet)	None	None	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,680.70	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	A90	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,705.55	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	A90V	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,705.55	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	A93	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,716.40	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	A93	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,745.91	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	M9B	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,758.28	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	M9B	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	M9BW	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,748.95	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	M9N	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	M9NV	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø21	0.1 to Less Than 1	0.116	With shock absorber	30	Side ported	M9P	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,622.48	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	Without auto switch (built-in magnet)	None	None	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	A93	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,698.20	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	A93	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	A93V	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,726.20	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	M9B	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	M9BW	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	M9BWV	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,749.41	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	M9B	5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,729.23	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	M9N	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø25	0.01 to Less Than 0.1	0.081	Includes adjusting bolt	50	Side ported	M9NV	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,820.58	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	Without auto switch (built-in magnet)	None	None	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,859.43	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	A90	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,870.17	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	A90	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,896.53	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	A93	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,909.01	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	A93V	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,924.53	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	M9B	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,936.90	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	M9B	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	M9BW	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,927.56	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	M9N	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,939.93	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	M9N	3	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 1,939.93	1 Piece(s)	32 Day(s)	Cleanroom	High Rigidity, High Accuracy	ø25	0.1 to Less Than 1	0.294	With shock absorber	50	Side ported	M9NV	0.5	2 pcs.	Rc 1/8	None	Clean Series (Vacuum type)
SGD 561.98	1 Piece(s)	32 Day(s)	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	Without auto switch (built-in magnet)	None	None	M3	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	F8B	0.5	2 pcs.	M3	None	Clean Series (Vacuum type)
SGD 667.22	1 Piece(s)	32 Day(s)	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	F8N	3	2 pcs.	M3	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	M9B	0.5	2 pcs.	M3	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	M9B	3	2 pcs.	M3	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	M9B	0.5	1 pc.	M3	None	Clean Series (Vacuum type)
-	1 Piece(s)	Quote	Cleanroom	Standard	ø6	Less than 0.005	0.001	Includes adjusting bolt	1	Side ported	M9BV	0.5	2 pcs.	M3	None	Clean Series (Vacuum type)

Basic Information

Type	Rotary Table 2-point Stop	Main Body Shape	Block Shape	Oscillation Angle A	190°
Operation Method	Double Rack	Valves	N/A

Configure

583 Part Numbers

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Configure Remaining Specifications

Completed

Specification/Dimensions

Environment, Applications
- Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)
- Cleanroom
Clear
Rigidity, Accuracy
- Standard
- High Rigidity, High Accuracy
Clear
Tube Nominal Dia.
ø6

ø8

Φ8

ø10

ø12

ø15

ø18

ø21

Φ21

ø25

ø28

ø32

ø40
Clear
Allowable Kinetic Energy(J)
- Less than 0.005
- 0.005 to Less Than 0.01
- 0.01 to Less Than 0.1
- 0.1 to Less Than 1
- 1 ~ Less than 50
Clear
Allowable Kinetic Energy(J)
0.001

0.0015

0.002

0.006

0.007

0.025

0.039

0.048

0.081

0.116

0.240

0.294

0.320

0.560

1.100

1.600

2.9
Clear
Format
- Includes adjusting bolt
- With shock absorber
Clear
Size
1

2

3

7

10

20

30

50

70

100

200
Clear
Connection port location
- Front ported
- Side ported
Clear
Switch
F8B

F8N

F8P

M9B

M9BA

M9BAV

M9BV

M9BW

M9BWV

M9N

M9NA

M9NAV

M9NV

M9NW

M9NWV

M9P

M9PA

M9PV

M9PW

M9PWV

A90

A90V

A93

A93V

A96

A96V

Without auto switch (built-in magnet)
Clear
Lead wire(m)
- 0.5
- 1
- 3
- 5
- None
Clear
Number of switches
- 1 pc.
- 2 pcs.
- 3 pcs.
- 4 pcs.
- None
Clear
Port types
NPT 1/8

Rc 1/8

M3

M5
Clear
Connector type
- M12 4-pin
- None
Clear
Type
- Clean Series (Vacuum type)
- Copper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)
- Copper and Fluorine Unavailable Specifications
Clear
type
- 11-MSQA
- 11-MSQB
- 20-MSQA
- 20-MSQB
- 22-MSQA
- 22-MSQB
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

32 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Environment, Applications

Rigidity, Accuracy

Tube Nominal Dia.

Allowable Kinetic Energy(J)

Allowable Kinetic Energy(J)

Format

Size

Connection port location

Switch

Lead wire(m)

Number of switches

Port types

Connector type

Type

type

CAD

Days to Ship

Specify Alterations

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