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Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Fluorinated Liquid Type, HRZ Series (Part Numbers)

Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Fluorinated Liquid Type, HRZ Series

[Features]
・ Many achievements in semiconductor process equipment with high temperature stability, wide temperature range, failure diagnosis, external communication, etc.
・ Compliant with various safety standards
・ UL, SEMI standard compliant, CE marking

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

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Part Number

Configured Part Number is shown.

Part Number
Part NumberMinimum order quantityVolume DiscountDays to ShipCooling capacity Optional specifications Setting Temperature Range

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Basic Information

Cooling method Water-cooled refrigeration type

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