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Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) (Part Numbers)

SMC

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Manual/Bellows Seal, XMH/XYH Series Specifications

Angle valve XMH Series external appearance

In-line type XYH series external appearance

Model		XMH-16	XMH-25 XYH-25	XMH-40 XYH-40	XMH-50 XYH-50
Flange (Valve) Size		16, CF034	25	40, CF070	50
Valve Type		Manual
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 150
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}		5	14	45	80
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Flange Type		KF (NW), CF	KF (NW)	KF (NW), CF	KF (NW)
Main Material		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Actuation torque N·m		0.1 ≤	0.15≦	0.35≦	0.5≦
Handle revolutions		5	7	10	13
Weight kg ^{Note 2:}	XMH	0.31 (0.35)	0.57	1.35 (1.71)	2.02
Weight kg ^{Note 2:}	XYH	-	0.62	1.37	2.42

Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Product Drawing

(Unit: mm)

XMH angle-type dimensional drawing

XYH in-line type dimensional drawing

Model	A	B	C	D	Fn	Fc	G	H	J	P.C.D. L1	L2
XMH-16	40	100.5	38	1	30	34	17	35	18	P.C.D 27	6 × ø4.4 mm
XMH-25	50	114	48	1	40	-	26	40.5	21.5	-	-
XMH-40	65	162.5	66	2	55	70	41	57	30	P.C.D 58.7	6 × ø6.6 mm
XMH-50	70	179.5	79	2	75	-	52	70	35	-	-

Model	A	B	C	D	E	Fn	G	H	J
XYH-25	100.2	75.8	48	1	23.5	40	26	40.5	21.5
XYH-40	130	102.5	66	2	38	55	41	57	30
XYH-50	178	119	79	2	53	75	52	70	35

Product Diagram

XMH angle-type (left) and XYH in-line type (right) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Notes

*The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*Refer to the manufacturer's catalog for parts other than those detailed above.

: 30; 60; 90

Part Number
XMH-16
XMH-16-XN1A
XMH-16-XN1B
XMH-16-XN1C
XMH-16-XP1A
XMH-16-XP1B
XMH-16-XP1C
XMH-16-XQ1A
XMH-16-XQ1B
XMH-16-XQ1C
XMH-16-XR1A
XMH-16-XR2A
XMH-16-XR3A
XMH-16-XT1A
XMH-16-XT1B
XMH-16-XT1C
XMH-16C
XMH-16C-XQ1A
XMH-16C-XQ1B
XMH-16C-XQ1C
XMH-25
XMH-25-XN1A
XMH-25-XP1A
XMH-25-XQ1A
XMH-25-XQ1B
XMH-25-XQ1C
XMH-25-XR3A
XMH-25-XS1A
XMH-25-XT1A
XMH-25-XT1B
XMH-25-XT1C
XMH-40
XMH-40-XN1A
XMH-40-XQ1A
XMH-40-XQ1C
XMH-40-XT1A
XMH-40C
XMH-40C-XN1A
XMH-40C-XN1C
XMH-40C-XQ1A
XMH-50
XMH-50-XN1A
XMH-50-XQ1A
XYH-25
XYH-25-XN1A
XYH-25-XP1A
XYH-25-XP1B
XYH-25-XP1C
XYH-25-XQ1A
XYH-25-XQ1B
XYH-25-XQ1C
XYH-25-XR1A
XYH-25-XR2A
XYH-25-XR3A
XYH-25-XT1A
XYH-25-XT1B
XYH-25-XT1C
XYH-40
XYH-40-XN1A
XYH-40-XP1A
XYH-40-XP1B
XYH-40-XP1C
XYH-40-XQ1A
XYH-40-XQ1C
XYH-50
XYH-50-XN1A
XYH-50-XP1A
XYH-50-XP1B
XYH-50-XQ1A
XYH-50-XQ1B
XYH-50-XR1A

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Sonic Speed Conductance	Valve Type	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location
SGD 729.05	1 Piece(s)	32 Day(s)	KF	16	5	Angle type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	KF	16	5	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Kalrez 4079	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Chemraz SS630	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	Chemraz SSE38	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	16	5	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	CF	16	5	Angle type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	CF	16	5	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	CF	16	5	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	CF	16	5	Angle type	Kalrez 4079	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
SGD 780.03	1 Piece(s)	46 Day(s)	KF	25	14	Angle type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	KF	25	14	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	Kalrez 4079	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	Chemraz (Compound No.: SSE38)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	VMQ (Formula No.: 1232-70)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	25	14	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
SGD 1,205.63	1 Piece(s)	32 Day(s)	KF	40	45	Angle type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	KF	40	45	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
SGD 1,562.52	1 Piece(s)	32 Day(s)	KF	40	45	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	40	45	Angle type	Kalrez 4079	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	40	45	Angle type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
SGD 1,296.17	1 Piece(s)	32 Day(s)	CF	40	45	Angle type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	CF	40	45	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	CF	40	45	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	CF	40	45	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	50	80	Angle type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	KF	50	80	Angle type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	50	80	Angle type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
SGD 927.85	1 Piece(s)	32 Day(s)	KF	25	14	In-line type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	KF	25	14	In-line type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Kalrez 4079	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Chemraz SS630	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	Chemraz SSE38	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	25	14	In-line type	FKM for Plasma 3310-75	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
SGD 1,353.45	1 Piece(s)	46 Day(s)	KF	40	45	In-line type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
-	1 Piece(s)	Quote	KF	40	45	In-line type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	40	45	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	40	45	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	40	45	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
-	1 Piece(s)	Quote	KF	40	45	In-line type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	40	45	In-line type	Kalrez 4079	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal
SGD 1,654.22	1 Piece(s)	32 Day(s)	KF	50	80	In-line type	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None
SGD 1,656.78	1 Piece(s)	32 Day(s)	KF	50	80	In-line type	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	50	80	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	50	80	In-line type	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	50	80	In-line type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal
-	1 Piece(s)	Quote	KF	50	80	In-line type	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal
-	1 Piece(s)	Quote	KF	50	80L/S	In-line type	Chemraz (Compound No.: SS592)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-9	Valve seal / external seal

Basic Information

Type	Manual Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

Configure

71 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- KF
- CF
Clear
Flange Nominal
- 16
- 25
- 40
- 50
Clear
Sonic Speed Conductance
5

14

14L/S

45

80

80L/S
Clear
Valve Type
- Angle type
- In-line type
Clear
Seal material
Chemraz (Compound No.: SSE38)

Chemraz SSE38

Barrel Perfluoro 70W

Chemraz (Compound No.: SS592)

Chemraz SS592

Chemraz SS630

VMQ (Formula No.: 1232-70)

FKM 1349-80

EPDM 2101-80

FKM for Plasma 3310-75

Kalrez 4079
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal

Valve seal / external seal
Clear
type
- XMH
- XMH-25
- XYH
- XYH-50
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

32 Day(s) or Less

46 Day(s) or Less
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) (Part Numbers)

(i)Caution

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Manual/Bellows Seal, XMH/XYH Series Specifications

Product Drawing

Product Diagram

Notes

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Valve Type

Seal material

Amount of leakage(Pa·m³/s)

Seal Change Location

type

CAD

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Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) (Part Numbers)

(i)Caution

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Manual/Bellows Seal, XMH/XYH Series Specifications

Product Drawing

Product Diagram

Notes

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Valve Type

Seal material

Amount of leakage(Pa·m3/s)

Seal Change Location

type

CAD

Days to Ship

Specify Alterations

Tech Support

Payment Method more

About MISUMI

About this Website

Useful Tools

Customer Service

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MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

Amount of leakage(Pa·m³/s)