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Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.

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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Angle valve XMD Series external appearance

Angle valve XMD series pilot port direction

In-line type XYD series external appearance

In-line type XYD series pilot port direction

Model		XMD-25 XYD-25	XMD-40 XYD-40	XMD-50 XYD-50	XMD-63 XYD-63	XMD-80 XYD-80
Flange (Valve) Size		25	40, CF070	50	63, CF114	80
Valve Type		Always closed (pressurize to open and spring seal) (both main and initial exhaust valves)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1}	Main Exhaust Valve	14	45	80	160	200
Conductance L/s ^{Note 1}	Initial Exhaust Valve	0.5 to 3	2 to 8	2.5 to 11	4 to 18	4 to 18
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Operating Time (s)	Main Exhaust Valve	0.10	0.21	0.24	0.26	0.28
Operating Time (s)	Initial Exhaust Valve	0.70	0.08	0.09	0.23	0.27
Flange Type		KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Flange Type		KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Main Material ^{Note 3}		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)		0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port Diameter		M5	Rc 1/8
Weight kg ^{Note 2}	XMD	0.65	1.50 (1.86)	2.20	4.10 (5.46)	6.80
Weight kg ^{Note 2}	XYD	0.71	1.52	2.60	4.80	8.30

Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

(Unit: mm)

XMD angle type dimensional drawing

XYD in-line type dimensional drawing

Model	A	B	C	D	Fn	Fd	Fc	G	H	J	K	P.C.D. L1	L2
XMD-25	50	123	48	1	40	-	-	26	41	16	7.5	-	-
XMD-40	65	170	66	2	55	-	70	41	63	20	15	P.C.D 58.7	6 × ø6.6 mm
XMD-50	70	183	79	2	75	-	-	52	68	20	17.5	-	-
XMD-63	88	217	100	3	87	95	114	70	72	20	19.5	P.C.D 92.1	8 × ø8.4 mm
XMD-80	90	256	117	3	114	110	-	83	98	20	26.5	-	-

Model	A	B	C	D	E	Fn	Fd	G	H	J	K
XYD-25	100.2	86.7	48	1	23.5	40	-	26	66	16	7.5
XYD-40	130	114	66	2	38	55	-	41	84	20	15
XYD-50	178	128	79	2	53	75	-	52	95	20	17.5
XYD-63	209	163	100	3	61	87	95	70	121	20	19.5
XYD-80	268	193	117	3	80	114	110	83	144	20	26.5

Product Diagram

XMD angle type diagram

XYD in-line type diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Product Working Principle

1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance.
2. Opening of the initial exhaust valve (valve S)
When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
3. Opening of the main exhaust valve (valve M)
When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
4. Closing of the initial and main exhaust valves
Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Notes

*The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*The temperature of the switch part must be no higher than 60°C.
*Refer to the manufacturer's catalog for product information not detailed above.

: 30; 45; 60

Part Number
XMD-25
XMD-25-A90A
XMD-25-A90LA
XMD-25-A90LA-XT1A
XMD-25-A93A
XMD-25-A93LC
XMD-25-M9//
XMD-25-M9BA
XMD-25-M9BC
XMD-25-M9BLA
XMD-25-M9BLA-XP1A
XMD-25-M9NA
XMD-25-M9NB
XMD-25-M9NC
XMD-25-M9NLA
XMD-25-M9NLA-XN1A
XMD-25-M9PLA
XMD-25-XN1A
XMD-25-XQ1A
XMD-25-XR1A
XMD-25H0
XMD-25H0-XN1A
XMD-25K
XMD-25L
XMD-25L-M9//
XMD-25L-M9BA
XMD-25L-M9BLA
XMD-25L-M9PLA
XMD-25LH0
XMD-25MH0
XMD-25MH0-XP1A
XMD-25MH0-XP1B
XMD-25MH0-XP1C
XMD-40
XMD-40-A90LA
XMD-40-A90LA-XT1A
XMD-40-A93A
XMD-40-A93LA
XMD-40-A93LB
XMD-40-M9//
XMD-40-M9BA
XMD-40-M9BC
XMD-40-M9BLA
XMD-40-M9NA
XMD-40-M9NC
XMD-40-M9NLA
XMD-40-M9NLA-XN1A
XMD-40-XN1A
XMD-40-XR1A
XMD-40H0
XMD-40H0-XN1A
XMD-40H0-XQ1A
XMD-40K
XMD-40K-A93A
XMD-40K-M9//
XMD-40K-M9BA
XMD-40K-M9NA
XMD-40KH0
XMD-40L
XMD-40L-M9//

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Sonic Speed Conductance	Valve Type	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
SGD 1,453.08	1 Piece(s)	32 Day(s)	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	D-M9P solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
SGD 2,184.12	1 Piece(s)	32 Day(s)	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, back	5 to 60	D-M9P solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	25	14L/S	Angle type	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A90 reed auto switch	2 pcs. valve open/closed	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	3
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-A93 reed auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
SGD 2,015.30	1 Piece(s)	32 Day(s)	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
SGD 2,119.25	1 Piece(s)	32 Day(s)	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	3
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
SGD 3,190.95	1 Piece(s)	32 Day(s)	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, left	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, left	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, left	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, left	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-

Basic Information

Type	Pilot Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

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171 Part Numbers

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Completed

Specification/Dimensions

Flange Nominal
- 25
- 40
- 50
- 63
- 80
Clear
Sonic Speed Conductance
14L/S

45L/S

80L/S

160L/S

200L/S
Clear
Valve Type
- Angle type
- In-line type
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B solid-state auto switch

D-M9N solid-state auto switch

D-M9P solid-state auto switch

M9B

M9N

M9P

A90

D-A90 reed auto switch

A93

D-A93 reed auto switch

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Chemraz SSE38

Barrel Perfluoro 70W

Chemraz SS592

VMQ 1232-70

VMQ (Formula No.: 1232-70)

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM 2101-80

EPDM (Formula No.: 2101-80)

FKM for Plasma 3310-75

Kalrez 4079
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal / S valve seal assembly / O-ring for fixing

Valve seal / external seal / S valve seal assembly / O-ring for fixing
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
type
- XMD
- XYD
Clear
Flange Type
- KF
- K
- CF
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

32 Day(s) or Less
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

(i)Caution

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Product Drawing

Product Diagram

Product Working Principle

Notes

Basic Information

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Specification/Dimensions

Flange Nominal

Sonic Speed Conductance

Valve Type

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

Flange Type

CAD

Days to Ship

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Amount of leakage(Pa·m³/s)