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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series (Part Numbers)

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series Specifications

Angle valve XMC Series external appearance

Angle valve XMC series pilot port direction

In-line type XYC series external appearance

In-line type XYC series pilot port direction

Model		XMC-16	XMC-25 XYC-25	XMC-40 XYC-40	XMC-50 XYC-50	XMC-63 XYC-63	XMC-80 XYC-80
Flange (Valve) Size		16, CF034	25	40, CF070	50	63, CF114	80
Valve Type		Double acting (dual operation), pressurize to open/close
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}		5	14	45	80	160	200
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Operating Time (s)		0.08	0.15	0.35	0.4	0.54	0.7
Flange Type		KF (NW), CF	KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Main Material		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)		0.3 to 0.6			0.4 to 0.6
Pilot Port Connection Port Diameter		M5		Rc 1/8
Weight kg ^{Note 2:}	XMC	0.36 (0.40)	0.62	1.40 (1.76)	2.10	3.80 (5.16)	6.30
Weight kg ^{Note 2:}	XYC	-	0.67	1.42	2.50	4.50	7.80

Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Product Drawing

(Unit: mm)

XMC-16 to 40 angle type dimensional drawing

Model	A	B	C	D	Fn	Fc	G	H	J	P.C.D L1	L2
XMC-16	40	110	38	1	30	34	17	40	26	P.C.D 27	6 × ø4.4 mm
XMC-25	50	120	48	1	40	-	26	39	28	-	-
XMC-40	65	171	66	2	55	70	41	63	36	P.C.D 58.7	6 × ø6.6 mm

XMC-50 to 80 angle type dimensional drawing

Model	A	B	C	D	Fn	Fd	Fc	G	H	J	P.C.D L1	L2	K
XMC-50	70	183	80	31	75	-	-	52	77	29	-	-	10.5
XMC-63	88	209	100	39	87	95	114	70	76.5	36	P.C.D 92.1	8 × ø8.4 mm	9
XMC-80	90	250	117	45.5	114	110	-	83	105	44	-	-	9

XYC-25, XYC-40 / in-line type dimensional drawing

Model	A	B	C	D	E	Fn	G	H	J
XYC-25	100.2	85	48	1	23.5	40	26	64	28
XYC-40	130	115	66	2	38	55	41	84	36

XYC-50 to 80- in-line type dimensional drawing

Model	A	B	C	D	E	Fn	Fd	G	H	J	K	M
XYC-50	178	121	80	31	53	75	-	52	104	29	10.5	78
XYC-63	209	148	100	39	61	87	95	70	126	36	9	99
XYC-80	268	177	117	45.5	80	114	110	83	150	44	9	116

Product Diagram

XMC angle-type (left) and XYC in-line type (right) diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Notes

*The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*The temperature of the switch part must be no higher than 60°C.
*Refer to the manufacturer's catalog for product information not detailed above.

: 30; 60; 90

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Part Number
XYC-50-1M9NZA-XN1B
XYC-50-1M9NZA-XN1C
XYC-50-1M9PZA-XN1A
XYC-50-A93LA
XYC-50H0-1
XYC-50H0-1-XP1A
XYC-50H0-1-XQ1A
XYC-50K-1
XYC-50K-1M9NA
XYC-50KH0-1-XQ1A
XYC-50MH0
XYC-63-1A93LA-XN1A
XYC-63-1M9NA
XYC-63-1M9NLA
XYC-63-A93LA
XYC-63D-1M9//
XYC-63D-1M9NA
XYC-63D-1M9NLA
XYC-63DH0
XYC-63DH0-XQ1A
XYC-63DK
XYC-63DKH0
XYC-63H0-1
XYC-80-1
XYC-80-1M9NA
XYC-80-1M9NLA
XYC-80D-1M9BZA
XYC-80H0-1
XYC-80H0-1-XQ1A

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Valve Type	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal	5
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-9	External seal	5
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 60	M9P	2 pcs. (Detection position: valve open/closed)	EPDM (Formula No.: 2101-80)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-9	Valve seal / external seal	5
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal	-
-	1 Piece(s)	Quote	KF	50	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal	-
-	1 Piece(s)	Quote	KF	50	In-line type	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	50	In-line type	Flange surface, left	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	50	In-line type	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal	-
-	1 Piece(s)	Quote	KF	50	In-line type	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	63	In-line type	Flange surface, back	5 to 60	A93	2 pcs. (Detection position: valve open/closed)	EPDM (Formula No.: 2101-80)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-9	Valve seal / external seal	3
-	1 Piece(s)	Quote	KF	63	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	63	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	KF	63	In-line type	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	K	63	In-line type	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
SGD 2,446.97	1 Piece(s)	32 Day(s)	K	63	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	K	63	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	K	63	In-line type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	[Others] DN	63	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (Compound No.: 4079)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-9	Valve seal / external seal	-
-	1 Piece(s)	Quote	K	63	In-line type	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	K	63	In-line type	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	63	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
SGD 3,364.67	1 Piece(s)	32 Day(s)	KF	80	In-line type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	80	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	0.5
-	1 Piece(s)	Quote	KF	80	In-line type	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	3
-	1 Piece(s)	Quote	K	80	In-line type	Flange surface, back	5 to 60	M9B	2 pcs. (Detection position: valve open/closed)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-11	None	5
-	1 Piece(s)	Quote	KF	80	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	None	-
-	1 Piece(s)	Quote	KF	80	In-line type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal	-

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Basic Information

Type	Pilot Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

Configure

299 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- KF
- K
- CF
- Others
  - DN
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Valve Type
- Angle type
- In-line type
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B solid-state auto switch

D-M9N solid-state auto switch

D-M9P solid-state auto switch

M9B

M9N

M9P

D-A90 reed auto switch (Flange size 16 not supported)

A93

D-A93 reed auto switch (Flange size 16 not supported)

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 1 pc. (Detection position: valve closed)
- 1 pc. (Detection position: valve open)
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. (Detection position: valve open/closed)
- 2 pcs. valve open/closed
- No auto switch
- No switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Chemraz SSE38

Barrel Perfluoro 70W

VMQ 1232-70

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM 2101-80

EPDM (Formula No.: 2101-80)

FKM for Plasma 3310-75

FKM for Plasma (Formula No.: 3310-75)

Kalrez 4079

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal

Valve seal / external seal
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
type
- XMC
- XYC
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

32 Day(s) or Less

41 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series (Part Numbers)

(i)Caution

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series Specifications

Product Drawing

Product Diagram

Notes

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Valve Type

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m³/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

CAD

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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series (Part Numbers)

(i)Caution

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series Specifications

Product Drawing

Product Diagram

Notes

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Valve Type

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

CAD

Days to Ship

Specify Alterations

Tech Support

Payment Method more

About MISUMI

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Customer Service

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MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

Amount of leakage(Pa·m³/s)