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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series (XMC-63CH0-1)

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series XMC-63CH0-1

SMC

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XMC-63CH0-1

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series Specifications

Angle valve XMC Series external appearance

Angle valve XMC Series external appearance

Angle valve XMC series pilot port direction

Angle valve XMC series pilot port direction

In-line type XYC series external appearance

In-line type XYC series external appearance

In-line type XYC series pilot port direction

In-line type XYC series pilot port direction

ModelXMC-16XMC-25 XYC-25XMC-40 XYC-40XMC-50 XYC-50XMC-63 XYC-63XMC-80 XYC-80
Flange (Valve) Size16, CF0342540, CF0705063, CF11480
Valve TypeDouble acting (dual operation), pressurize to open/close
FluidsInert gas vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160200
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Operating Time (s)0.080.150.350.40.540.7
Flange TypeKF (NW), CFKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Main MaterialMain body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)0.3 to 0.60.4 to 0.6
Pilot Port Connection Port DiameterM5Rc 1/8
Weight kg Note 2:XMC0.36 (0.40)0.621.40 (1.76)2.103.80 (5.16)6.30
XYC-0.671.422.504.507.80

Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Product Drawing

 

(Unit: mm)

 

XMC-16 to 40 angle type dimensional drawing

XMC-16 to 40 angle type dimensional drawing

ModelABCDFnFcGHJP.C.D L1L2
XMC-16401103813034174026P.C.D 276 × ø4.4 mm
XMC-255012048140-263928--
XMC-40651716625570416336P.C.D 58.76 × ø6.6 mm
XMC-50 to 80 angle type dimensional drawing

XMC-50 to 80 angle type dimensional drawing

ModelABCDFnFdFcGHJP.C.D L1L2K
XMC-5070183803175--527729--10.5
XMC-63882091003987951147076.536P.C.D 92.18 × ø8.4 mm9
XMC-809025011745.5114110-8310544--9
XYC-25, XYC-40 / in-line type dimensional drawing

XYC-25, XYC-40 / in-line type dimensional drawing

ModelABCDEFnGHJ
XYC-25100.28548123.540266428
XYC-401301156623855418436
XYC-50 to 80- in-line type dimensional drawing

XYC-50 to 80- in-line type dimensional drawing

ModelABCDEFnFdGHJKM
XYC-5017812180315375-521042910.578
XYC-63209148100396187957012636999
XYC-8026817711745.58011411083150449116

Product Diagram

XMC angle-type (left) and XYC in-line type (right) diagram

XMC angle-type (left) and XYC in-line type (right) diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Notes

  • *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part must be no higher than 60°C.
  • *Refer to the manufacturer's catalog for product information not detailed above.
30
45
60
  1. 1
Part Number
XMC-63CH0-1
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote CF63Angle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

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  1. 1
 

Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XMC-63CH0-1 in the Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series series.

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Specification/Dimensions

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

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  • type

    • XMC
    • XYC

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  • Flange Type

    • KF
    • K
    • CF
    • Others
      • DN

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  • Flange Nominal

    • 16
    • 25
    • 40
    • 50
    • 63
    • 80

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  • Valve Type

    • Angle type
    • In-line type

    Clear

  • Pilot Port Direction

    • Flange side
    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Temperature Range(°C)

    • 5 to 60
    • 5 to 150

    Clear

  • Switch Part Number

    • D-M9B solid-state auto switch
    • D-M9N solid-state auto switch
    • D-M9P solid-state auto switch
    • M9B
    • M9N
    • M9P
    • D-A90 reed auto switch (Flange size 16 not supported)
    • A93
    • D-A93 reed auto switch (Flange size 16 not supported)
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)

    Clear

  • Number of Switches

    • 1 pc. (Detection position: valve closed)
    • 1 pc. (Detection position: valve open)
    • 1 pc. valve closed
    • 1 pc. valve open
    • 2 pcs. (Detection position: valve open/closed)
    • 2 pcs. valve open/closed
    • No auto switch
    • No switch

    Clear

  • Seal material

    • Chemraz (Compound No.: SSE38)
    • Chemraz SSE38
    • Barrel Perfluoro 70W
    • VMQ 1232-70
    • FKM 1349-80
    • FKM (Formula No.: 1349-80)
    • EPDM 2101-80
    • EPDM (Formula No.: 2101-80)
    • FKM for Plasma 3310-75
    • FKM for Plasma (Formula No.: 3310-75)
    • Kalrez 4079
    • Kalrez (Compound No.: 4079)

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
    • Internal: 1.3 × 10-10, External: 1.3 × 10-11
    • Internal: 1.3 × 10-10, External: 1.3 × 10-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-9

    Clear

  • Seal Change Location

    • External seal
    • None
    • Valve seal
    • Valve seal / external seal

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 32 Day(s) or Less
    • 41 Day(s) or Less

    Clear

Specify Alterations

Similar Part Numbers

Part Number
XMC-16-M9BA-XQ1A
XMC-16-M9BLA
XMC-16-M9BLA-XQ1A
XMC-63CKH0-1
XMC-63CL-1M9NLA
XMC-63D-1M9//
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal3

-

1 Piece(s) Quote CF63Angle typeFlange surface, left5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote CF63Angle typeFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote K63Angle typeFlange side5 to 60No auto-switch (with built-in magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11None-

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