(!)Due to Microsoft's end of support for Internet Explorer 11 on 15/06/2022, this site does not support the recommended environment.
Instead, please kindly use other browsers like Google Chrome, Microsoft Edge or Mozilla Firefox.
50,000 Stock items for Same Day Ship Out.
All Categories
Categories
- Automation Components
A wide variety of standard and configurable components for factory automation engineers in industries such as automotive, semiconductor, packaging, medical and many more.
- Linear Motion
- Rotary Motion
- Connecting Parts
- Rotary Power Transmission
- Motors
- Conveyors & Material Handling
- Locating, Positioning, Jigs & Fixtures
- Inspection
- Sensors, Switches
- Pneumatics, Hydraulics
- Vacuum Components
- Hydraulic Equipment
- Discharging / Painting Devices
- Pipe, Tubes, Hoses & Fittings
- Modules, Units
- Heaters, Temperature Control
- Framing & Support
- Casters, Leveling Mounts, Posts
- Doors, Cabinet Hardware
- Springs, Shock Absorbers
- Adjusting, Fastening, Magnets
- Antivibration, Soundproofing Materials, Safety Products
- Fasteners
A good selection of accessories such as screws, bolts, washers and nuts that you may need for your daily engineering usage.
- Materials
Browse industrial materials ranging from heat insulating plates, sponges, to metal and plastic materials in different sizes to meet your various applications.
- Wiring Components
A wide variety of wiring parts for connecting and protecting control and PC parts including Connectors, Cables, Electric Wires, Crimping Terminals and more.
- LAN Cables / Industrial Network Cables
- Cables by Application
- Cables with Connectors
- RS232 / Personal Computers / AV Cables
- Wires/Cables
- Connectors (General Purpose)
- Crimp Terminals
- Zip Ties
- Cable Glands
- Cable Bushings/Clips/Stickers
- Screws/Spacers
- Cable Accessories
- Tubes
- Protection Tubes
- Ducts/Wiremolds
- General Purpose Tools
- Dedicated Tools
- Soldering Supplies
- Electrical & Controls
A wide variety of controls and PC parts for electrical engineers including Controls, Powers, PC parts and more.
- Cutting Tools
A wide variety of cutting tools for many uses and work materials including End Mills, Drills, Cutters, Reamers, Turning Tools and more.
- Carbide End Mills
- HSS End Mills
- Milling Cutter Inserts/Holders
- Customized Straight Blade End Mills
- Dedicated Cutters
- Turning Tools
- Drill Bits
- Screw-Hole-Related Tools
- Reamers
- Chamfering / Centering Tools
- Fixtures Related to Cutting Tools
- Step Drills
- Hole Saws
- Clean Key Cutters
- Core Drills (Tip Tools)
- Magnetic Drilling Machine Cutters
- Drill Bits for Electric Drilling Machines
- Woodworking Drill Cutters
- Drills for Concrete
- Processing Tools
A wide variety of tools and supplies used in processing including Machine Tools, Measurement Tools, Grinding and Polishing Supplies and more.
- Material Handling & Storage
A wide variety of goods used in shipment, material handling and warehouse including Tape supplies, Stretch film, Truck, Shelf, Crane and more.
- Tape Supplies
- Cushioning Materials
- Stretch Films
- Cardboard
- Plastic Bags
- PP Bands
- Magic Tapes / Tying Belts
- Rubber Bands
- Strings/Ropes
- Cable Ties
- Tags
- Labelers
- Unpacking Cutters
- Packing Support Equipment
- Cloth Sheets for Packing
- Conveyance/Dolly Carts
- Tool Wagons
- Tool Cabinets / Container Racks
- Lifters / Hand Pallets
- Container Pallets
- Storage Supplies
- Shelves/Racks
- Work Benches
- Suspended Clamps/Suspended Belts
- Jack Winches
- Chain Block Cranes
- Bottles/Containers
- Bicycle Storage Area
- Safety & General Supplies
A large variety of goods for every kind of factories and offices including Protection items, Cleaning supplies, sanitations, office supplies and more.
- Lab & Clean Room Supplies
A large variety of items used in R&D and Clean Room including research Equipment, Laboratory Essentials, Analysis Supplies, Clean Environment-Related Equipment and more.
- Press Die Components
Choose from thousands of standard stamping die components including Punch & Die, Gas Springs, Guide Components, Coil Springs and many more.
- Plastic Mold Components
Browse our wide variety of mold components including Ejector Pins, Sleeves, Leader Components, Sprue Bushings and many more.
- Ejector Pins
- Sleeves, Center Pins
- Core Pins
- Sprue bushings, Gates, and other components
- Date Mark Inserts, Recycle Mark Inserts, Pins with Gas Vent
- Undercut, Plates
- Leader Components, Components for Ejector Space
- Mold Opening Controllers
- Cooling or Heating Components
- Accessories, Others
- Components of Large Mold, Die Casting
- Injection Molding Components
Browse our injection molding components including Heating Items, Couplers, Hoses and more.
- Injection Molding Machine Products
- Accessories of Equipment
- Auxiliary Equipment
- Air Nippers
- Air Cylinders
- Air Chuck for Runner
- Chuck Board Components
- Frames
- Suction Components
- Parallel Air Chuck
- Special Air Chuck
- Chemical for Injection Molding
- Mold Maintenance
- Heating Items
- Heat Insulation Sheets
- Couplers, Plugs, One-touch Joints
- Tubes, Hoses, Peripheral Components
Search by Application
Brands
- Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 24/11/2024 to 7:00 (SGT) 25/11/2024. We apologize for the inconvenience.
- Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) (XLS-16-5D-Q)
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XLS-16-5D-Q
Aluminum High Vacuum Angle Valve, Electromagnetic Type, Bellows Pressure Balance, XLS Series Specifications
XLS Series (no control power supply) external appearance
XLS Series (with control power supply) external appearance
| Model | XLS-16 | XLS-25 | XLS-16-P□G | XLS-25-P□G | |
|---|---|---|---|---|---|
| Valve Type | Normally closed (N.C.) | ||||
| Fluids | Inert gas vacuum | ||||
| Operating Temperature (°C) | 5 to 40 | ||||
| Operating Pressure Pa (abs) | 0.1 MPa (G) to 1 × 10-6 (abs) | ||||
| Conductance L/s Note 1: | 5 | 8 | 5 | 8 | |
| Amount of leakage Pa·m3/s | Internal | 1.3 × 10 -8, values at normal temperature and excluding gas permeation | |||
| External | 1.3 × 10 -11, values at normal temperature and excluding gas permeation | ||||
| Flange Type and Size | KF16 | KF25 | KF16 | KF25 | |
| Main Material Note 2: | Main body: aluminum alloy, Main parts: stainless steel, PFA, FKM (standard sealing material) | ||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||
| Control Power Supply Yes/No | None | Yes | |||
| Operating Power Supply Voltage | 24/6, 48/12, 100/24 V DC | 24 V DC, 100/200 V AC | |||
| Allowable Voltage Fluctuation % | ±10 | ||||
| Electrical Entry | G, C, D, T types | G type only | |||
| Lead Wire | AWG20, outer diameter: 2.63 mm | VCTF2 × 0.75, outer diameter: 2.3 mm, Sheath outer diameter: 6.6 mm | |||
| Coil Insulation Type | Class B | ||||
| Maximum Operating Frequency (Hz) | 0.17 | ||||
| Weight (kg) | 0.4 | 0.7 | 0.7 | 1.0 | |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: A coating of vacuum grease (Y-VAC3) has been applied to the valve seat section of the vacuum part.
Product Power/Current (When Applying Rated Voltage)
| Model | Startup | Holding | ||||
|---|---|---|---|---|---|---|
| Power (W) | Current (A) | Power (W) | Current (A) | |||
| XLS-16- | □G/C/D/T, P5G | 36 | 1.5 | 4.8 | 0.38 | |
| P1G | 50 Hz | 30.5 | 0.47 | 14.8 | 0.35 | |
| 60 Hz | 10 | 0.27 | ||||
| P2G | 50 Hz | 30 | 0.24 | 4.9 | 0.11 | |
| 60 Hz | 2.3 | 0.10 | ||||
| XLS-25- | □G/C/D/T, P5G | 47 | 2.0 | 5.3 | 0.5 | |
| P1G | 50 Hz | 42 | 0.62 | 20 | 0.46 | |
| 60 Hz | 13.5 | 0.36 | ||||
| P2G | 50 Hz | 45 | 0.35 | 6.7 | 0.15 | |
| 60 Hz | 3.0 | 0.12 | ||||
Product Drawing
XLS no control power supply
(Unit: mm)
Grommet (G) dimensional drawing
Conduit (C) dimensional drawing
Terminal (T) dimensional drawing
DIN terminal (D) dimensional drawing
XLS with control power supply
(Unit: mm)
Grommet (G) dimensional drawing
| Model | A | B | C | D | E | F | G | J | K | L | M |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XLS-16-□G | 40 | 104 | 113 | 38 | 30 | 35 | 17 | 23 | - | - | 25.5 |
| XLS-16-□C | 96 | 41 | - | - | |||||||
| XLS-16-□D | 60 | 48 | - | ||||||||
| XLS-16-□T | 129 | 95 | 62 | - | |||||||
| XLS-25-□G | 50 | 128.5 | 138.5 | 48 | 40 | 40 | 26 | 25.5 | - | - | 28 |
| XLS-25-□C | 121.5 | 43 | - | - | |||||||
| XLS-25-□D | 120.5 | 63 | 51 | - | |||||||
| XLS-25-□T | 121.5 | 154.5 | 97 | 66 | - | ||||||
| XLS-16-P□G | 40 | 96 | 113 | 38 | 30 | 35 | 17 | 23 | 87 | 66.5 | - |
| XLS-25-P□G | 50 | 121.5 | 138.5 | 48 | 40 | 40 | 26 | 25.5 | 89.5 | 69 | - |
Product Structure/Operation
XLS Series diagram
*Refer to p. 465 of the manufacturer's catalog for maintenance parts.
Working Principle
- XLS-□-□□ (no control power supply)
Applying the starting voltage across the coil assembly for approx. 0.15 to 0.2 s opens valve (9). Thereafter, this is held at 25% of the starting voltage. Do not apply the starting voltage for more than 0.3 s as doing so may cause coil burnout. When power to the coil assembly is stopped, valve (9) closes. - XLS-□-P□G (with control power supply)
Applying the rated voltage across the coil assembly opens valve (9). When power to the coil assembly is stopped, valve (9) closes.
*The pressure balance mechanism allows an unrestricted exhaust direction.
Notes
- *The body material is A6063, the bellows material is SUS316L, the metal materials used for the other vacuum parts are 13Cr stainless steel, SUS304 and A2017 and the sealing material is FKM. The armature assembly part of the vacuum sections uses a fluorinated resin (PFA). A fluorinated grease coating has been applied to the valve in the vacuum section. Check that the fluid in use will not damage the selected material.
- *When there is no operating power supply, the starting voltage is applied for only 0.15 to 0.2 s. After this, a holding voltage (25% of the starting voltage) should be applied. Failure to do this may cause coil burnout or fire.
- *Be sure to install a fuse or an earth leakage circuit breaker in the power supply circuit.
- *Use within the operating pressure range.
- *Refer to the manufacturer's catalog for parts other than those detailed above.
| Part Number |
|---|
| XLS-16-5D-Q |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Voltage | Sonic Speed Conductance | Electrical Entry Method | CE-marked | Control Power Supply Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | DIN terminal | CE-marked | None |
Loading...
Basic Information
| Type | Solenoid Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
| Driving Type | Directly Operated | Pipe Port Type | Flange | Flange Type | KF |
| Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XLS-16-5D-Q in the Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) series.
Specification/Dimensions
-
type
- XLS
- XLS-16
-
Flange Nominal
- 16
- 25
-
Voltage
- DC24V
- AC100V
- AC200V
-
Sonic Speed Conductance
-
Electrical Entry Method
- Conduit
- DIN terminal
- Grommet
- Terminal
-
CE-marked
- CE-marked
- None
-
Control Power Supply Yes/No
- None
- With control power supply
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 41 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Similar Part Numbers
| Part Number |
|---|
| XLS-16-5C |
| XLS-16-5D |
| XLS-16-5G |
| XLS-16-5G-Q |
| XLS-16-5T |
| XLS-16-5T-Q |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Voltage | Sonic Speed Conductance | Electrical Entry Method | CE-marked | Control Power Supply Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Conduit | None | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | DIN terminal | None | None | ||
SGD 627.08 | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Grommet | None | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Grommet | CE-marked | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Terminal | None | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Terminal | - | None |
Tech Support
Payment Method
- Credit Card
- PayPal
- Bank Transfer
Social Media
MISUMI Contact
Copyright © MISUMI Corporation All Rights Reserved.
How can we improve?
How can we improve?