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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series Specifications
XLH Series external appearance
| Model | XLH-16 | XLH-25 | XLH-40 | XLH-50 | |
|---|---|---|---|---|---|
| Fluids | Inert gas vacuum | ||||
| Operating Temperature (°C) | 5 to 150 | ||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||
| Flange Type | KF (NW) | ||||
| Main Material | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | ||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||
| Actuation torque N·m | 0.1 ≤ | 0.15≦ | 0.35≦ | 0.5≦ | |
| Handle revolutions | 5 | 7 | 10 | 13 | |
| Weight (kg) | 0.23 | 0.41 | 1.05 | 1.62 | |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Product Drawing
(Unit: mm)
XLH Series dimensional drawing
| Model | A | B | C | D | E Note 1: | F | G | H |
|---|---|---|---|---|---|---|---|---|
| XLH-16 | 40 | 100.5 | 38 | 1 | - | 30 | 17 | 35 |
| XLH-25 | 50 | 114 | 48 | 1 | 12 | 40 | 26 | 41 |
| XLH-40 | 65 | 162.5 | 66 | 2 | 11 | 55 | 41 | 57 |
| XLH-50 | 70 | 179.5 | 79 | 2 | 11 | 75 | 52 | 70 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.
Product Diagram
XLH Series diagram
*Refer to the manufacturer's catalog for maintenance parts.
Product Working Principle
The valve opens by rotating the handle to the left. The handle does not move up and down. The indicator shows whether or not the valve is open or closed.
As the the handle turns to the right, the valve begins to close. The valve will be sealed when you no longer feel the turning force. The sealing force for the valve is provided by spring and is constant.
Product Options Descriptions
- Heater
Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. - Indicator
When the valve is open, an orange mark appears towards the center of the name plate.
Notes
- *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *When using with heaters (thermistors), install a device for preventing overheating.
- *Use within the operating pressure range.
- *For gases which cause a large amount of deposits, either heat the valve body or use the type with a heater to prevent deposits in the valve.
- *Refer to the manufacturer's catalog for parts other than those detailed above.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|
SGD 623.00 | 1 Piece(s) | Quote | 16 | 5L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Chemraz (Compound No.: SS592) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Chemraz (Compound No.: SS592) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-11 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | External seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 16 | 5L/S | Chemraz SSE38 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
SGD 648.90 | 1 Piece(s) | Quote | 25 | 14L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Kalrez 4079 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | External seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | ULTIC ARMOR UA4640 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | External seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Chemraz SS592 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | Chemraz SSE38 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | ULTIC ARMOR (Compound No.: UA4640) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | 25 | 14L/S | ULTIC ARMOR UA4640 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | With heater for 120℃ | ||
SGD 960.40 | 1 Piece(s) | Quote | 40 | 45L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | EPDM (Formula No.: 2101-80) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | EPDM (Formula No.: 2101-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-9 | External: hard anodized aluminum, Internal: base material | External seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | Kalrez (Compound No.: 4079) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-9 | External: hard anodized aluminum, Internal: base material | External seal | None | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | With heater for 100°C | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | 40 | 45L/S | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | With heater for 120℃ | ||
SGD 1,168.07 | 1 Piece(s) | Quote | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | None | ||
- | 1 Piece(s) | Quote | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | None | ||
- | 1 Piece(s) | Quote | 50 | 80L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 50 | 80L/S | ULTIC ARMOR (Compound No.: UA4640) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | With heater for 100°C | ||
- | 1 Piece(s) | Quote | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | With heater for 120℃ |
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Basic Information
| Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows Seal |
Specification/Dimensions
-
Flange Nominal
- 16
- 25
- 40
- 50
-
Sonic Speed Conductance
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLH
- XLH-16
- XLH-25
- XLH-40
- XLH-50
-
CAD
- 2D
- 3D
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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