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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series (XLD-25-M9NC)

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series XLD-25-M9NC

SMC

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XLD-25-M9NC

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLD Series Specifications

XLD Series external appearance

XLD Series external appearance

XLD Series operating port direction

XLD Series operating port direction

ModelXLD-25XLD-40XLD-50XLD-63XLD-80
Valve TypeAlways closed (spring return and seal) (both main and initial exhaust valves)
FluidsInert gas vacuum
Operating Temperature (°C)XLD5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:Main Exhaust Valve144580160200
Initial Exhaust Valve0.5 to 32 to 82.5 to 114 to 184 to 18
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main Material Note 3:Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port DiameterXLDM5Rc 1/8
Weight (kg)XLD0.51.21.83.45.6

Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

XLD air-operated type dimensional drawing

XLD air-operated type dimensional drawing

 

(Unit: mm)

 

ModelABCDEFnFdGHJK
XLD-25501234811240-2641167.5
XLD-40651706621155-41632015
XLD-50701837921175-52682017.5
XLD-6388217100311879570722020
XLD-809025611731111411083982026.5

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLD Series diagram

XLD Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

Initial exhaust valve conductance settings graph

Initial exhaust valve conductance settings graph

  • 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise.
  • 2. Opening of the initial exhaust valve (valve S)
    When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
  • 3. Opening of the main exhaust valve (valve M)
    When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
  • 4. Closing of the initial and main exhaust valves
    Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)

""A" Section Thread Tightening Torque

  • XLD-25/XLD-40/XLD-50: 0.08 N·m (0.8 kgf·cm) or less
  • XLD-63/XLD-80: 0.3 N·m (3 kgf·cm) or less

Product Options Descriptions

  • Auto switch (for main exhaust valve)
    The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C).
  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part on the auto switch must be no higher than 60°C.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
30
45
60
  1. 1
Part Number
XLD-25-M9NC
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m) 		Heater Yes/No

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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  1. 1
 

Basic Information

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLD-25-M9NC in the Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series series.

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Specification/Dimensions

  • type

    • XLD
    • XLD-25
    • XLD-40
    • XLD-50
    • XLD-63
    • XLD-80

    Clear

  • Flange Type

    • KF
    • K

    Clear

  • Flange Nominal

    • 25
    • 40
    • 50
    • 63
    • 80

    Clear

  • Sonic Speed Conductance

    • 14L/S
    • 45L/S
    • 80L/S
    • 160L/S
    • 200L/S

    Clear

  • Pilot Port Direction

    • Flange side
    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Temperature Range(°C)

    • 5 to 60
    • 5 to 150

    Clear

  • Switch Part Number

    • D-M9B solid-state auto switch
    • D-M9N solid-state auto switch
    • D-M9P solid-state auto switch
    • M9B
    • M9N
    • M9P
    • A90
    • D-A90 reed auto switch
    • A93
    • D-A93 reed auto switch
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)
    • Without auto switch (no built-in magnet)

    Clear

  • Number of Switches

    • 1 pc. valve closed
    • 1 pc. valve open
    • With 1 pc. (Detection position: Valve closing)
    • With 1 pc. (Detection position: Valve opening)
    • 2 pcs. valve open/closed
    • With 2 pcs. (Detection position: Valve opening and closing)
    • No auto switch
    • No switch

    Clear

  • Seal material

    • Chemraz (Compound No.: SSE38)
    • Barrel Perfluoro (Compound No.: 70 W)
    • Chemraz (Compound No.: SS592)
    • Chemraz (Compound No.: SS630)
    • VMQ 1232-70
    • VMQ (Formula No.: 1232-70)
    • FKM 1349-80
    • FKM (Formula No.: 1349-80)
    • EPDM (Formula No.: 2101-80)
    • FKM for Plasma (Formula No.: 3310-75)
    • Kalrez (Compound No.: 4079)
    • ULTIC ARMOR (Compound No.: UA4640)

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
    • Internal: 1.3 × 10-10, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
    • Internal: 1.3 × 10^-8 external: 1.3 × 10^-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-9

    Clear

  • Body Surface Treatment

    • External: hard anodized aluminum, Internal: base material
    • External: hard anodized aluminum, internal: anodic oxidation

    Clear

  • Seal Change Location

    • External seal
    • None
    • Valve seal / external seal / S valve seal assembly / O-ring for fixing

    Clear

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

    Clear

  • Heater Yes/No

    • With heater for 100°C
    • With heater for 120℃
    • None

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Specify Alterations

Similar Part Numbers

Part Number
XLD-25-A93LA
XLD-25-A93LC
XLD-25-M9//
XLD-25-M9NLA
XLD-25-M9NLB
XLD-25-M9NLC
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m) 		Heater Yes/No

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

SGD 1,265.60

1 Piece(s) Quote KF2514L/SFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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