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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series (Part Numbers)
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
(i)Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Japanese Only
Part Number
Configured Part Number is shown.
| Part Number |
|---|
| Part Number | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|
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Basic Information
| Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Elastic Seal |
Specification/Dimensions
-
Flange Type
- KF
- K
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × -10, External: 1.3 × -10
- Internal: 1.3 × -10, External: 1.3 × -8
- Internal: 1.3 × -8, External: 1.3 × -10
- Internal: 1.3 × -8, External: 1.3 × -8
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-8
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-8
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLG
- XLG-16
- XLG-25
- XLG-40
- XLG-50
- XLG-63
- XLG-80
-
CAD
- 2D
- 3D
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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