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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve (XLFV-16G-2M9BZA-5GZ-Q)
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
(i)Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Japanese Only
Part Number
Configured Part Number is shown.
XLFV-16G-2M9BZA-5GZ-Q
Drawing
Product Specifications
Product Specifications
| Part number | XLF (V)-16-2 | XLF (V)-25-2 | XLF (V)-40-2 | XLF (V)-50-2 | XLF (V)-63-2 | XLF (V)-80-2 | |
|---|---|---|---|---|---|---|---|
| Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
| Operating fluid | Inert gas vacuum | ||||||
| Operating temperature °C | 5 to 50 | ||||||
| Operating Pressure Pa (abs) | 1 × 10^-5 to atmospheric pressure | ||||||
| Conductance L/s^*1) | 5 | 14 | 45 | 80 | 160 | 200 | |
| Leakage Pa · m^3/s | Internal | For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation | |||||
| External | For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation | ||||||
| Flange Type | KF (NW) | KF (NW)·K (DN) | |||||
| Main materials^*2) | Main body: aluminum alloy main part: stainless steel, FKM (standard sealing material) | ||||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||||
| Pilot pressure MPa (G) | 0.4 to 0.7 | ||||||
| Pilot Port Connection port diameter | M5: 1 (P) / 3 (R) ports | Rc1/8: 1 (P) port, M5: 3 (R) ports | |||||
| Weight (kg) | 0.34 | 0.54 | 1.3 | 2.0 | 3.4 | 5.8 | |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
*2) Vacuum grease [Y-VAC2] is applied to the sliding part of the seal of the vacuum part.
Standard table
| Part Number |
|---|
| XLFV-16G-2M9BZA-5GZ-Q |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Indicator | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | M9B | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | - | 5 |
Loading...
Basic Information
| Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
| Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Elastic Seal |
Please check the type/dimensions/specifications of the part XLFV-16G-2M9BZA-5GZ-Q in the Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve series.
Specification/Dimensions
-
CE-marked
- Not compatible
-
type
- XLFV
- XLFV-16
- XLFV-25
- XLFV-40
- XLFV-50
- XLFV-63
- XLFV-80
-
Flange Type
- KF
- K
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Voltage
- DC24V
- AC100V
- AC220V
- AC220V
-
Sonic Speed Conductance
-
Indicator
- No indicator
- With indicator
-
Pilot Port Direction
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Switch Part Number
-
Number of Switches
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × -10, External: 1.3 × -11
- Internal: 1.3 × -8, External: 1.3 × -9
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
-
Electrical Entry Method
- Grommet (lead wire length: 300 mm)
- Grommet (lead wire length: 600 mm)
- L-type plug connector
- M-type plug connector
-
Light/Surge Voltage Suppressor
- None
- With light and surge voltage suppressor
- With light and surge voltage suppressor (non-polarized type)
- With surge voltage suppressor
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 3
- 5
-
CAD
- 2D
- 3D
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Similar Part Numbers
| Part Number |
|---|
| XLFV-16G-2M9//-5GZ |
| XLFV-16G-2M9//-5LZ |
| XLFV-16G-2M9//-5WOZ |
| XLFV-16G-2M9NA-1G |
| XLFV-16G-2M9NA-5GU |
| XLFV-16K-2-5G |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Indicator | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -11 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | L-type plug connector | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | - | - | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
- | 1 Piece(s) | Quote | KF | 16 | AC100V | 5L/S | With indicator | Flange surface, back | D-M9N (solid-state auto switch) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -11 | Grommet (lead wire length: 300 mm) | None | External: hard anodized aluminum, Internal: base material | None | Not compatible | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | M9N | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | External: hard anodized aluminum, Internal: base material | None | Not compatible | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | No indicator | Flange surface, left | No auto-switch (no magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | Grommet (lead wire length: 300 mm) | None | External: hard anodized aluminum, Internal: base material | None | Not compatible | - |
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