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High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series (Part Numbers)

SMC

An air operated valve made by SMC.
[Features]
· Guide ring prevents internal leakage
· Diaphragm (PTFE) prevents formation of micro-bubbles
· Prevents residual liquid
· Body with outstanding corrosion resistance (New PFA)

(i)Caution

Product images may be representative images. Refer to the catalog for details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series Specifications

LVA Series: basic type external appearance

LVA Series: LVA-Z (pilot port: 1/8) external appearance

LVA Series: flow rate adjustment equipped external appearance

Model		LVA10	LVA20	LVA30	LVA40	LVA50	LVA60
Orifice Diameter		ø2 mm	ø4 mm	ø8 mm	ø12 mm	ø20 mm	ø22 mm
Piping Connection Port Diameter		1/8, 1/4	1/8, 1/4	1/4, 3/8	3/8 / 1/2	1/2 / 3/4	1
Flow Rate Characteristics	Kv	0.06	0.3	1.4	2.8	5.1	6.8
Flow Rate Characteristics	Cv	0.07	0.35	1.7	3.3	6	8
Withstand Pressure (MPa)		1
Operating Pressure (MPa)	A → B	0 to 0.5	(-94 kPa)^*3 0 to 0.5			(-94 kPa)^*3 0 to 0.4
Operating Pressure (MPa)	B → A	0 to 0.05	(-94kPa)^*3 0 to 0.2			(-94kPa)^*3 0 to 0.1
Back Pressure (MPa)	N.C./N.O^*2	0.15 or less	0.3 or less			0.2 or less
Back Pressure (MPa)	Double Acting	0.3 or less	0.4 or less			0.3 or less
Valve Leakage Rate (cm³/min)		0 (with hydraulic pressure)
Pilot Operation Pressure (MPa)		0.3 to 0.5
Pilot Port Diameter	Standard	M5	M5^*4	Rc 1/8, NPT 1/8, G 1/8
Pilot Port Diameter	-Z Type^*5	-	Rc 1/8, NPT 1/8, G 1/8	-
Fluid Temperature (°C)		0 to 100^*1
Ambient Temperature (°C)		0 to 60
Weight (kg)	SUS	0.12	0.18	0.44	0.86	1.67	1.96
	PPS	0.05	0.08	0.18	0.32	0.73	-
	PFA	0.05	0.09	0.20	0.35	0.78	0.90

*1: 0 to 60°C when diaphragm is NBR/EPDM.
*2: N.O. type not available for LVA10.
*3: If using with a vacuum, select products with a product number ending in -V. Cannot be used for vacuum retention. Moreover, using the B port side as the vacuum source may shorten the product lifespan.
*4: Applicable to LVC21 (N.O.) and LVC22 (double acting) types.
*5: Applicable to LVC20 (N.C.) -Z type.

Product Dimensions

Body material: SUS

LVA20 dimensional drawing

LVA1□/LVA21/LVA22/LVA3□ to 6□ dimensional drawing

(Units: mm)

Model	A	B	C	E	F	G	H	K	L	N	O	P	Q	R	T
LVA1□	20	33	49.5	10	M5 × 0.8 × 4	27.5	11	-	13	27.5	-	Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8, 1/4 ^*	M5 × 0.8	ø4.2 mm	-
LVA20	30	33	54.2	10	M5× 0.8 × 5	31.5	-	22	22	26.5	14.8		Rc 1/8 NPT 1/8 G 1/8 ^*	ø2.4 mm	20
LVA21 LVA22	30	33	57	10	M5× 0.8 × 5	31	13	22	22	26	-		M5 × 0.8	M3 × 0.5	-
LVA3□	36	47	78.6	13	M6 × 1.0 × 8	42.5	17.5	37	26	38.5	-	Rc 1/4, 3/8 NPT 1/4, 3/8 G 1/4, 3/8^*	Rc 1/8 NPT 1/8 G 1/8 ^*	Rc 1/8 NPT 1/8 G 1/8 ^*	-
LVA4□	46	60	95.4	16	M8 × 1.25 × 10	54.5	18	47.5	33.5	47.5	-	Rc 3/8, 1/2 NPT 3/8, 1/2 G 3/8, 1/2^*			-
LVA5□	58	75	122.5	19	M8 × 1.25 × 10	61.5	27.5	60	43	55.5	-	Rc 1/2, 3/4 NPT 1/2, 3/4 G 1/2, 3/4^*			-
LVA6□	58	85	129.8	24	M8 × 1.25 × 10	68.8	27.5	60	43	62.8	-	Rc 1 NPT1 G1 ^*			-

*Refer to the SMC catalog regarding G thread / thread depth.

With flow rate adjustment: LVA20 dimensional drawing

LVA2□: S / 14.5 mm
LVA3□: S / 24.4 mm
LVA4□: S / 29 mm
LVA5□: S / 34.5 mm
LVA6□: S / 36 mm

With indicator: LVA20 dimensional drawing

LVA20: W / 63.7 mm
LVA30: W / 89.1 mm
LVA40: W / 109.9 mm
LVA50: W / 140.5 mm
LVA60: W / 147.8 mm

Product Diagram

Standard type: N.C. type diagram

With flow rate adjustment type diagram

With indicator type diagram

Number	Part Name	Material	Option
1	Actuator Section	PPS	PVDF
2	Body	SUS	-
		PPS
		PFA
3	Diaphragm	PTFE	-
		NBR
		EPR
4	End Plate (PFA Body only)	PPS	PVDF
5	Flow Rate Adjuster	PPS	-
6	Indicator	PP	-

Precautions

*Do not use metal fittings with a resin body (taper threads). This will cause damage to the valve body.
*Do not use if air leakage increases or the equipment does not operate correctly. After mounting, perform suitable function and leak tests to confirm that the mounting is correct.
*Mount and use the product only after reading and understanding the contents of the instruction manual. Be sure to keep the manual somewhere handy so that it can be referred to whenever needed.
*Be sure to read the individual product precautions before use.
*See the SMC catalog for product information other than the above.

: 30; 60; 90

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Part Number
LVA50-06F-B4
LVA50-06F-C
LVA50-06F-C1
LVA50-06F-C2
LVA50-06F-N
LVA50-06N-A
LVA50-06N-A1
LVA50-06N-A4
LVA50-06N-A-V
LVA50-06N-B
LVA50-06N-B1
LVA50-06N-C4
LVA50-06N-G4
LVA50-06N-N
LVA51-04-A
LVA51-04-A-V
LVA51-04F-A
LVA51-04N-A
LVA51-06-A
LVA51-06-A-V
LVA51-06-B
LVA51-06-D
LVA51-06-H
LVA51-06F-B
LVA51-06F-N
LVA51-06N-A
LVA51-06N-A-V
LVA51-06N-B
LVA51-06N-F
LVA52-04-A
LVA52-04-A1
LVA52-04-A-V
LVA52-04-D1
LVA52-04-E
LVA52-04N-A
LVA52-06-A
LVA52-06-A1
LVA52-06-A-V
LVA52-06-B
LVA52-06-B1
LVA52-06-B-V
LVA52-06-D
LVA52-06-D1
LVA52-06-E
LVA52-06-E1
LVA52-06-G1
LVA52-06-H
LVA52-06-H1
LVA52-06F-C
LVA52-06N-A
LVA52-06N-C
LVA60-10-A
LVA60-10-A1
LVA60-10-A1-V
LVA60-10-A4
LVA60-10-A4-V
LVA60-10-A-V
LVA60-10F-A
LVA60-10F-A4
LVA60-10F-A-V
LVA60-10F-C
LVA60-10F-N
LVA60-10N-A
LVA60-10N-A4
LVA60-10N-C1
LVA60-10N-C4
LVA61-10-A
LVA62-10-A
LVA62-10-A1
LVA62-10-A-V
LVA62-10-C-V
LVA62-10F-A
LVA62-10N-A
LVA62-10N-C1

Standard Unit Price	Minimum order quantity	Days to Ship	Applicable Fluid	Operating Environment	Switching Type	Connection Type	Plumbing Thread Nominal	Driving Type	Orifice Dia. (Ø)	Option	Body material	Detailed type	Functions	Pilot port thread type	Diaphragm	Specifications	End plate material
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	3/4	-	-	With indicator	PPS	-	None	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	3/4	-	-	None	PFA	-	None	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	3/4	-	-	With flow rate adjustment	PFA	-	None	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	3/4	-	-	With bypass	PFA	-	None	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	3/4	-	20	None	PFA	-	Ammonium hydroxide compatible	G 1/8	PTFE	None	PPS
SGD 1,137.73	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	None	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	With flow rate adjustment	SUS	None	-	NPT 1/8	PTFE	-	-
SGD 1,164.80	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	With indicator	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	None	SUS	Vacuum specification	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	None	PPS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	With flow rate adjustment	PPS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	NPT	3/4	-	-	With indicator	PFA	-	None	NPT 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	3/4	Pilot Type	20	With indicator	PPS	None	-	NPT 1/8	NBR	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	NPT	3/4	-	-	None	PFA	-	Ammonium hydroxide compatible	NPT 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	[Rc (R)] Rc	1/2	Pilot Type	20	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Open	[Rc (R)] Rc	1/2	Pilot Type	20	None	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Open	G	1/2	-	-	None	SUS	-	None	G 1/8	PTFE	None	None
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	NPT	1/2	Pilot Type	20	None	SUS	None	-	NPT 1/8	PTFE	-	-
SGD 1,137.73	1 Piece(s)	Quote	Chemical	Standard	Normally Open	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Open	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
SGD 446.13	1 Piece(s)	Quote	Chemical	Standard	Normally Open	[Rc (R)] Rc	3/4	Pilot Type	20	None	PPS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	None	-	Rc 1/8	NBR	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	[Rc (R)] Rc	3/4	Pilot Type	20	None	PPS	None	-	Rc 1/8	EPDM	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	G	3/4	Pilot Type	20	None	PPS	None	-	G 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Open	G	3/4	-	20	None	PFA	-	Ammonium hydroxide compatible	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	NPT	3/4	Pilot Type	20	None	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Open	NPT	3/4	Pilot Type	20	None	SUS	Vacuum specification	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Open	NPT	3/4	Pilot Type	20	None	PPS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Open	NPT	3/4	-	-	None	PFA	-	None	NPT 1/8	PTFE	None	PVDF
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1/2	Pilot Type	20	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1/2	Pilot Type	20	With flow rate adjustment	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1/2	Pilot Type	20	None	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	[Others] Double acting	[Rc (R)] Rc	1/2	-	-	With flow rate adjustment	SUS	-	None	Rc 1/8	NBR	None	None
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1/2	Pilot Type	20	None	SUS	None	-	Rc 1/8	EPDM	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	NPT	1/2	Pilot Type	20	None	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	With flow rate adjustment	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	PPS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	With flow rate adjustment	PPS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	PPS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	None	-	Rc 1/8	NBR	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	[Others] Double acting	[Rc (R)] Rc	3/4	-	20	With flow rate adjustment	SUS	-	None	Rc 1/8	NBR	None	None
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	SUS	None	-	Rc 1/8	EPDM	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	With flow rate adjustment	SUS	None	-	Rc 1/8	EPDM	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	With flow rate adjustment	PPS	None	-	Rc 1/8	NBR	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	None	PPS	None	-	Rc 1/8	EPDM	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	3/4	Pilot Type	20	With flow rate adjustment	PPS	None	-	Rc 1/8	EPDM	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	[Others] Double acting	G	3/4	-	20	None	PFA	-	None	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	NPT	3/4	Pilot Type	20	None	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	[Others] Double acting	NPT	3/4	-	20	None	PFA	-	None	NPT 1/8	PTFE	None	PPS
SGD 1,285.90	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	[Rc (R)] Rc	1	Pilot Type	22	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	[Rc (R)] Rc	1	Pilot Type	22	With flow rate adjustment	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Closed	[Rc (R)] Rc	1	Pilot Type	22	With flow rate adjustment	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
SGD 1,312.97	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	[Rc (R)] Rc	1	Pilot Type	22	With indicator	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Closed	[Rc (R)] Rc	1	Pilot Type	22	With indicator	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	Normally Closed	[Rc (R)] Rc	1	Pilot Type	22	None	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	G	1	Pilot Type	22	None	SUS	None	-	G 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	G	1	Pilot Type	22	With indicator	SUS	None	-	G 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	High Corrosion Resistance	Normally Closed	G	1	-	22	None	SUS	-	None	G 1/8	PTFE	Vacuum specification	None
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	1	-	22	None	PFA	-	None	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	G	1	-	22	None	PFA	-	Ammonium hydroxide compatible	G 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	1	Pilot Type	22	None	SUS	None	-	NPT 1/8	PTFE	-	-
SGD 1,312.97	1 Piece(s)	Quote	Chemical	Standard	Normally Closed	NPT	1	Pilot Type	22	With indicator	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	NPT	1	-	22	With flow rate adjustment	PFA	-	None	NPT 1/8	PTFE	None	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	Normally Closed	NPT	1	-	22	With indicator	PFA	-	None	NPT 1/8	PTFE	None	PPS
SGD 1,285.90	1 Piece(s)	Quote	Chemical	Standard	Normally Open	[Rc (R)] Rc	1	Pilot Type	22	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1	Pilot Type	22	None	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1	Pilot Type	22	With flow rate adjustment	SUS	None	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	Standard	[Others] Double acting	[Rc (R)] Rc	1	Pilot Type	22	None	SUS	Vacuum specification	-	Rc 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Vacuum / Chemical	High Corrosion Resistance	[Others] Double acting	[Rc (R)] Rc	1	-	22	None	PFA	-	None	Rc 1/8	PTFE	Vacuum specification	PPS
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	[Others] Double acting	G	1	-	22	None	SUS	-	None	G 1/8	PTFE	None	None
-	1 Piece(s)	Quote	Chemical	Standard	[Others] Double acting	NPT	1	Pilot Type	22	None	SUS	None	-	NPT 1/8	PTFE	-	-
-	1 Piece(s)	Quote	Chemical	High Corrosion Resistance	[Others] Double acting	NPT	1	-	22	With flow rate adjustment	PFA	-	None	NPT 1/8	PTFE	None	PPS

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Basic Information

Type	Air Operating Type	Operating Temperature Range(°C)	0::60	Number of Solenoids	Single Solenoid
Operating Pressure Differential Range(MPa)	0.3::0.5	Application	Single Item

Configure

524 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Applicable Fluid
- Vacuum
- Chemical
Clear
Operating Environment
- Standard
- High Corrosion Resistance
Clear
Switching Type
- Normally Closed
- Normally Open
- Others
  - Double acting
Clear
Connection Type
- Rc (R)
  - Rc
- G
- NPT
Clear
Plumbing Thread Nominal
1/8

1/4

3/8

1/2

3/4

1
Clear
Driving Type
- Pilot Type
Clear
Orifice Dia.(Ø)
2

4

8

12

20

22
Clear
Option
- None
- With bypass
- With flow rate adjustment
- With flow rate adjustment and bypass
- With indicator
Clear
Body material
- PFA
- PPS
- SUS
Clear
Detailed type
- None
- Vacuum specification
Clear
Functions
Ammonium hydroxide compatible

None
Clear
Pilot port thread type
- G 1/8
- NPT 1/8
- Rc 1/8
- M5
Clear
Diaphragm
- EPDM
- NBR
- PTFE
Clear
Specifications
- None
- Vacuum specification
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End plate material
- None
- PPS
- PVDF
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type
- LVA
- LVA1□
- LVA2□
- LVA3□
- LVA4□
- LVA5□
- LVA6□
Clear
CAD
- 2D
- 3D
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series (Part Numbers)

(i)Caution

High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series Specifications

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Body material: SUS

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