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High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series (Part Numbers)

High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series

SMC

SMC

An air operated valve made by SMC.
[Features]
· Guide ring prevents internal leakage
· Diaphragm (PTFE) prevents formation of micro-bubbles
· Prevents residual liquid
· Body with outstanding corrosion resistance (New PFA)

(i)Caution

  • Product images may be representative images. Refer to the catalog for details.

PDF

Part Number

Configured Part Number is shown.

High Purity Chemical Liquid Valve, Air Operated Threaded Type LVA Series Specifications

LVA Series: basic type external appearance

LVA Series: basic type external appearance

LVA Series: LVA-Z (pilot port: 1/8) external appearance

LVA Series: LVA-Z (pilot port: 1/8) external appearance

LVA Series: flow rate adjustment equipped external appearance

LVA Series: flow rate adjustment equipped external appearance

ModelLVA10LVA20LVA30LVA40LVA50LVA60
Orifice Diameterø2 mmø4 mmø8 mmø12 mmø20 mmø22 mm
Piping Connection Port Diameter1/8, 1/41/8, 1/41/4, 3/83/8 / 1/21/2 / 3/41
Flow Rate CharacteristicsKv0.060.31.42.85.16.8
Cv0.070.351.73.368
Withstand Pressure (MPa)1
Operating Pressure
(MPa)		A → B0 to 0.5(-94 kPa)*3 0 to 0.5(-94 kPa)*3 0 to 0.4
B → A0 to 0.05(-94kPa)*3 0 to 0.2(-94kPa)*3 0 to 0.1
Back Pressure (MPa)N.C./N.O*20.15 or less0.3 or less0.2 or less
Double Acting0.3 or less0.4 or less0.3 or less
Valve Leakage Rate (cm3/min)0 (with hydraulic pressure)
Pilot Operation Pressure (MPa)0.3 to 0.5
Pilot Port DiameterStandardM5M5*4Rc 1/8, NPT 1/8, G 1/8
-Z Type*5-Rc 1/8, NPT 1/8, G 1/8-
Fluid Temperature (°C)0 to 100*1
Ambient Temperature (°C)0 to 60
Weight (kg)SUS0.120.180.440.861.671.96
PPS0.050.080.180.320.73-
PFA0.050.090.200.350.780.90

*1: 0 to 60°C when diaphragm is NBR/EPDM.
*2: N.O. type not available for LVA10.
*3: If using with a vacuum, select products with a product number ending in -V. Cannot be used for vacuum retention. Moreover, using the B port side as the vacuum source may shorten the product lifespan.
*4: Applicable to LVC21 (N.O.) and LVC22 (double acting) types.
*5: Applicable to LVC20 (N.C.) -Z type.

Product Dimensions

Body material: SUS

LVA20 dimensional drawing

LVA20 dimensional drawing

LVA1□/LVA21/LVA22/LVA3□ to 6□ dimensional drawing

LVA1□/LVA21/LVA22/LVA3□ to 6□ dimensional drawing

 

(Units: mm)

 

ModelABCEFGHKLNOPQRT
LVA1□203349.510M5 × 0.8 × 427.511-1327.5-Rc 1/8, 1/4
NPT 1/8, 1/4
G 1/8, 1/4 *		M5 × 0.8ø4.2 mm-
LVA20303354.210M5× 0.8 × 531.5-222226.514.8Rc 1/8
NPT 1/8
G 1/8 *		ø2.4 mm20
LVA21
LVA22		30335710M5× 0.8 × 53113222226-M5 × 0.8M3 × 0.5-
LVA3□364778.613M6 × 1.0 × 842.517.5372638.5-Rc 1/4, 3/8
NPT 1/4, 3/8
G 1/4, 3/8*		Rc 1/8
NPT 1/8
G 1/8 *		Rc 1/8
NPT 1/8
G 1/8 *		-
LVA4□466095.416M8 × 1.25 × 1054.51847.533.547.5-Rc 3/8, 1/2
NPT 3/8, 1/2
G 3/8, 1/2*		-
LVA5□5875122.519M8 × 1.25 × 1061.527.5604355.5-Rc 1/2, 3/4
NPT 1/2, 3/4
G 1/2, 3/4*		-
LVA6□5885129.824M8 × 1.25 × 1068.827.5604362.8-Rc 1
NPT1
G1 *		-

*Refer to the SMC catalog regarding G thread / thread depth.

With flow rate adjustment: LVA20 dimensional drawing

With flow rate adjustment: LVA20 dimensional drawing

  • LVA2□: S / 14.5 mm
  • LVA3□: S / 24.4 mm
  • LVA4□: S / 29 mm
  • LVA5□: S / 34.5 mm
  • LVA6□: S / 36 mm
With indicator: LVA20 dimensional drawing

With indicator: LVA20 dimensional drawing

  • LVA20: W / 63.7 mm
  • LVA30: W / 89.1 mm
  • LVA40: W / 109.9 mm
  • LVA50: W / 140.5 mm
  • LVA60: W / 147.8 mm

Product Diagram

Standard type: N.C. type diagram

Standard type: N.C. type diagram

With flow rate adjustment type diagram

With flow rate adjustment type diagram

With indicator type diagram

With indicator type diagram

NumberPart NameMaterialOption
1Actuator SectionPPSPVDF
2BodySUS-
PPS
PFA
3DiaphragmPTFE-
NBR
EPR
4End Plate (PFA Body only)PPSPVDF
5Flow Rate AdjusterPPS-
6IndicatorPP-

Precautions

  • *Do not use metal fittings with a resin body (taper threads). This will cause damage to the valve body.
  • *Do not use if air leakage increases or the equipment does not operate correctly. After mounting, perform suitable function and leak tests to confirm that the mounting is correct.
  • *Mount and use the product only after reading and understanding the contents of the instruction manual. Be sure to keep the manual somewhere handy so that it can be referred to whenever needed.
  • *Be sure to read the individual product precautions before use.
  • *See the SMC catalog for product information other than the above.
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Part Number
LVA12-01-A
LVA12-01-B
LVA12-01-C
LVA12-01-D
LVA12-01-E
LVA12-01-G
LVA12-01N-A
LVA12-02-A
LVA12-02-B
LVA22-01-A
LVA22-01-A1
LVA22-01-A1-V
LVA22-01-A-V
LVA22-01-D
LVA22-01-D1
LVA22-01-E1
LVA22-01N-A
LVA22-01N-A-V
LVA22-01N-D
LVA22-02-A
LVA22-02-A1
LVA22-02-A1-V
LVA22-02-A-V
LVA22-02-B
LVA22-02-B1
LVA22-02-B-V
LVA22-02-C
LVA22-02-C1
LVA22-02-C-V
LVA22-02-D
LVA22-02-D1
LVA22-02-E
LVA22-02-G
LVA22-02-G1
LVA22-02-H
LVA22-02-H1
LVA22-02-N1
LVA22-02F-A
LVA22-02F-A1
LVA22-02F-C
LVA22-02F-C1
LVA22-02N-A1
LVA22-02N-B1
LVA22-02N-C
LVA22-02N-C1
LVA32-02-A
LVA32-02-A1
LVA32-02-A-V
LVA32-02-D
LVA32-02-D1
LVA32-02-E
LVA32-02-E1
LVA32-02F-A
LVA32-02F-A1
LVA32-02N-A
LVA32-03-A
LVA32-03-A1
LVA32-03-A1-V
LVA32-03-A-V
LVA32-03-B
LVA32-03-B1
LVA32-03-B1-V
LVA32-03-B-V
LVA32-03-C
LVA32-03-C1
LVA32-03-C2
LVA32-03-C3
LVA32-03-C-V
LVA32-03-D
LVA32-03-D1
LVA32-03-E
LVA32-03-G
LVA32-03-G1
LVA32-03-H
LVA32-03-N
LVA32-03F-A
LVA32-03N-A
LVA32-03N-C
LVA32-03N-C1
LVA42-03-A
LVA42-03-A1
LVA42-03-A-V
LVA42-03-D
LVA42-03-E
LVA42-03F-A
LVA42-04-A
LVA42-04-A1
LVA42-04-A-V
LVA42-04-B
LVA42-04-B1
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipApplicable Fluid Operating Environment Switching Type Connection Type Plumbing Thread Nominal Driving Type Orifice Dia.
(Ø) 		Option Body material Detailed type Functions Pilot port thread type Diaphragm Specifications End plate material

SGD 318.73

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type2NoneSUSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type2NonePPSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalHigh Corrosion Resistance[Others] Double acting[Rc (R)] Rc1/8--NonePFA-NoneM5PTFENonePPS

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type2NoneSUSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type2NoneSUSNone-M5EPDM--

SGD 184.80

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type2NonePPSNone-M5NBR--

SGD 318.73

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/8Pilot Type2NoneSUSNone-M5PTFE--

SGD 318.73

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type2NoneSUSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type2NonePPSNone-M5PTFE--

SGD 465.27

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4NoneSUSNone-M5PTFE--

SGD 532.23

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4With flow rate adjustmentSUSNone-M5PTFE--

SGD 573.65

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4With flow rate adjustmentSUSVacuum specification-M5PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4NoneSUSVacuum specification-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4NoneSUSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4With flow rate adjustmentSUSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/8Pilot Type4With flow rate adjustmentSUSNone-M5EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/8Pilot Type4NoneSUSNone-M5PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalHigh Corrosion Resistance[Others] Double actingNPT1/8--NoneSUS-NoneM5PTFEVacuum specificationNone

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/8Pilot Type4NoneSUSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NoneSUSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentSUSNone-M5PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentSUSVacuum specification-M5PTFE--

SGD 506.68

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NoneSUSVacuum specification-M5PTFE--

SGD 188.07

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NonePPSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentPPSNone-M5PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NonePPSVacuum specification-M5PTFE--

SGD 299.60

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NonePFANone-M5PTFE--

SGD 366.45

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentPFANone-M5PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NonePFAVacuum specification-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NoneSUSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentSUSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NoneSUSNone-M5EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NonePPSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentPPSNone-M5NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4NonePPSNone-M5EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentPPSNone-M5EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type4With flow rate adjustmentPFANoneAmmonium hydroxide compatibleM5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG1/4Pilot Type4NoneSUSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG1/4Pilot Type4With flow rate adjustmentSUSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG1/4Pilot Type4NonePFANone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG1/4Pilot Type4With flow rate adjustmentPFANone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/4Pilot Type4With flow rate adjustmentSUSNone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/4Pilot Type4With flow rate adjustmentPPSNone-M5PTFE--

SGD 299.60

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/4Pilot Type4NonePFANone-M5PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/4Pilot Type4With flow rate adjustmentPFANone-M5PTFE--

SGD 646.92

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8NoneSUSNone-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8With flow rate adjustmentSUSNone-Rc 1/8PTFE--

SGD 688.33

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8NoneSUSVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8NoneSUSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8With flow rate adjustmentSUSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8NoneSUSNone-Rc 1/8EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/4Pilot Type8With flow rate adjustmentSUSNone-Rc 1/8EPDM--

-

1 Piece(s) Quote ChemicalHigh Corrosion Resistance[Others] Double actingG1/4-8NoneSUS-NoneG 1/8PTFENoneNone

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG1/4Pilot Type8With flow rate adjustmentSUSNone-G 1/8PTFE--

SGD 646.92

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT1/4Pilot Type8NoneSUSNone-NPT 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NoneSUSNone-Rc 1/8PTFE--

SGD 720.18

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentSUSNone-Rc 1/8PTFE--

SGD 761.60

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentSUSVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NoneSUSVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePPSNone-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentPPSNone-Rc 1/8PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentPPSVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePPSVacuum specification-Rc 1/8PTFE--

SGD 382.43

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePFANone-Rc 1/8PTFE--

SGD 455.70

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentPFANone-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With bypassPFANone-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustment and bypassPFANone-Rc 1/8PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePFAVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NoneSUSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentSUSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NoneSUSNone-Rc 1/8EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePPSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8With flow rate adjustmentPPSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePPSNone-Rc 1/8EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type8NonePFANoneAmmonium hydroxide compatibleRc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG3/8Pilot Type8NoneSUSNone-G 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT3/8Pilot Type8NoneSUSNone-NPT 1/8PTFE--

SGD 382.43

1 Piece(s) Quote ChemicalStandard[Others] Double actingNPT3/8Pilot Type8NonePFANone-NPT 1/8PTFE--

-

1 Piece(s) Quote ChemicalHigh Corrosion Resistance[Others] Double actingNPT3/8-8With flow rate adjustmentPFA-NoneNPT 1/8PTFENonePPS

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type12NoneSUSNone-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type12With flow rate adjustmentSUSNone-Rc 1/8PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type12NoneSUSVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type12NoneSUSNone-Rc 1/8NBR--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc3/8Pilot Type12NoneSUSNone-Rc 1/8EPDM--

-

1 Piece(s) Quote ChemicalStandard[Others] Double actingG3/8Pilot Type12NoneSUSNone-G 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/2Pilot Type12NoneSUSNone-Rc 1/8PTFE--

SGD 959.23

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/2Pilot Type12With flow rate adjustmentSUSNone-Rc 1/8PTFE--

-

1 Piece(s) Quote Vacuum / ChemicalStandard[Others] Double acting[Rc (R)] Rc1/2Pilot Type12NoneSUSVacuum specification-Rc 1/8PTFE--

-

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/2Pilot Type12NonePPSNone-Rc 1/8PTFE--

SGD 376.02

1 Piece(s) Quote ChemicalStandard[Others] Double acting[Rc (R)] Rc1/2Pilot Type12With flow rate adjustmentPPSNone-Rc 1/8PTFE--

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Basic Information

Type Air Operating Type Operating Temperature Range(°C) 0::60 Number of Solenoids Single Solenoid
Operating Pressure Differential Range(MPa) 0.3::0.5 Application Single Item

Configure

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134 Part Numbers

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Specification/Dimensions

  • Applicable Fluid

    • Vacuum
    • Chemical

    Clear

  • Operating Environment

    • Standard
    • High Corrosion Resistance

    Clear

  • Switching Type

    • Normally Closed
    • Normally Open
    • Others
      • Double acting

    Clear

  • Connection Type

    • Rc (R)
      • Rc
    • G
    • NPT

    Clear

  • Plumbing Thread Nominal

    • 1/8
    • 1/4
    • 3/8
    • 1/2
    • 3/4
    • 1

    Clear

  • Driving Type

    • Pilot Type

    Clear

  • Orifice Dia.(Ø)

    • 2
    • 4
    • 8
    • 12
    • 20
    • 22

    Clear

  • Option

    • None
    • With bypass
    • With flow rate adjustment
    • With flow rate adjustment and bypass
    • With indicator

    Clear

  • Body material

    • PFA
    • PPS
    • SUS

    Clear

  • Detailed type

    • None
    • Vacuum specification

    Clear

  • Functions

    • Ammonium hydroxide compatible
    • None

    Clear

  • Pilot port thread type

    • G 1/8
    • NPT 1/8
    • Rc 1/8
    • M5

    Clear

  • Diaphragm

    • EPDM
    • NBR
    • PTFE

    Clear

  • Specifications

    • None
    • Vacuum specification

    Clear

  • End plate material

    • None
    • PPS
    • PVDF

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